Auger Crater-edge Profiling of Multilayer Film by Auger Electron Spectroscopy.
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چکیده
منابع مشابه
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Auger electrm specm and Auger yields of free argon clusm in the I\I('Zp) excitation regime are reported. The Auger yield specua show chmcmistic changes as a function of cluster size. The results indicafe that the Auger yield signal originates primarily i%om the surface of the clusm. The results are compared to bulk-sensitive experimental techniques, such as tMal elecucm yields my), zero kinetic...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1993
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.36.665